JPH03110441U - - Google Patents
Info
- Publication number
- JPH03110441U JPH03110441U JP1884490U JP1884490U JPH03110441U JP H03110441 U JPH03110441 U JP H03110441U JP 1884490 U JP1884490 U JP 1884490U JP 1884490 U JP1884490 U JP 1884490U JP H03110441 U JPH03110441 U JP H03110441U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- base
- photomask
- mounting device
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1884490U JPH03110441U (en]) | 1990-02-28 | 1990-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1884490U JPH03110441U (en]) | 1990-02-28 | 1990-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03110441U true JPH03110441U (en]) | 1991-11-13 |
Family
ID=31521987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1884490U Pending JPH03110441U (en]) | 1990-02-28 | 1990-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03110441U (en]) |
-
1990
- 1990-02-28 JP JP1884490U patent/JPH03110441U/ja active Pending